Does it comply with the relevant specifications of the Semiconductor Equipment and Materials International (SEMI)?
In semiconductor manufacturing equipment (such as PECVD, ALD, etchers, and ion implanters) and Ultra-High Vacuum (UHV) environments, Fiber Optic Vacuum Feedthroughs / Flanges typically need to meet stringent requirements for ultimate vacuum levels, leak rates, outgassing rates, and surface cleanliness.
Although the Semiconductor Equipment and Materials International (SEMI) does not have a single, specific equipment standard for the niche component “Fiber Optic Vacuum Flange,” such products in practical applications must fully comply with and be compatible with SEMI’s general system specifications regarding vacuum chamber integrity, high-purity materials, low outgassing, and contamination prevention.
OFSCN®'s fiber optic vacuum sealed flanges are fully compatible with and meet the relevant core requirements of semiconductor equipment and SEMI specifications concerning the following key technical physical indicators:
1. Physical Interface Standards (Compatible with SEMI/ISO General Mechanical Interfaces)
Semiconductor vacuum equipment adheres to unified standards for physical flange interfaces to ensure the interchangeability and high hermeticity of different components on the reaction chambers.
- CF Series Flanges: Comply with the ISO 3669 (ConFlat) sealing specification, using metal copper gaskets for knife-edge sealing, suitable for Ultra-High Vacuum (UHV) environments.
- KF Series Flanges: Comply with the ISO 2861 / DIN 28403 quick-release specification, suitable for high vacuum environments.
2. Vacuum Level and Leak Rate Control
Semiconductor processes have extremely high demands for chamber ultimate vacuum and leak rates to prevent external atmosphere (especially oxygen and water vapor) from permeating and contaminating high-purity process gases.
- OFSCN®'s fiber optic vacuum flanges exhibit excellent hermeticity, with vacuum levels better than 1 \times 10^{-7}\ \text{Pa} and 1 \times 10^{-9}\ \text{Pa}, fully meeting the leak rate detection specifications for vacuum components in semiconductor equipment (typically required to be below 1 \times 10^{-9}\ \text{Pa}\cdot\text{m}^3/\text{s}).
3. Low Outgassing Rate and Anti-Contamination Materials (Compliant with SEMI F20 and Vacuum Cleanliness Requirements)
Under UHV conditions, conventional fiber optic coatings (such as acrylates) and traditional sealing materials can exhibit significant outgassing, releasing Volatile Organic Compounds (VOCs). This can lead to severe wafer contamination in semiconductor thin-film deposition and lithography processes.
- Body Material: High-quality stainless steel (default 316L) is selected, complying with semiconductor process requirements for high-purity vacuum environments regarding anti-corrosion and low outgassing properties (e.g., SEMI F20).
- Special Fiber Medium: The optical fiber installed inside the flange can be chosen as high-temperature-resistant, low-outgassing polyimide-coated fiber or gold-coated inorganic fiber, depending on the actual working wavelength and environment.
- Encapsulation Process: OFSCN® employs proprietary inorganic/low-outgassing sealing encapsulation technology, avoiding the use of common, easily aged silicone adhesives, thereby ensuring no additional gas release under high temperature and UHV conditions.
4. High-Temperature Resistance and Bake-out Capability
Semiconductor vacuum chambers typically undergo high-temperature bake-out procedures after startup or maintenance to remove adsorbed water molecules and impurities from the chamber walls.
- OFSCN® products not only support normal temperature operation but also offer customizable versions resistant to temperatures up to 250\ ^{\circ}\text{C}, allowing them to be baked out along with the semiconductor chamber without experiencing sealing material failure, aging, or increased leak rates.
Related Product Information
To meet the application demands of the aforementioned semiconductor and ultra-high vacuum environments, OFSCN® provides the following standardized and customized products:
- Product Name: OFSCN® Fiber Optic Vacuum Sealed Flange
- Key Performance Indicators:
- Structural Form: Available in CF and KF series, can be female or male, single or multi-port;
- Temperature Range: Suitable for normal temperature use, customizable for high-temperature resistance up to 250\ ^{\circ}\text{C};
- Ultimate Vacuum: Better than 1 \times 10^{-7}\ \text{Pa} and 1 \times 10^{-9}\ \text{Pa};
- Other Parameters: Refer to the official website for details.
