In semiconductor processes or space simulation chambers, how are fiber signals extracted without compromising vacuum integrity (leak rate requirements)?
To extract fiber signals in semiconductor processes or space simulation chambers without compromising vacuum integrity, a specialized component called a Fiber Optic Vacuum Sealed Flange is used.
The OFSCN® Fiber Optic Vacuum Sealed Flange is designed for this purpose. It allows optical fibers to pass through a vacuum chamber wall while maintaining the vacuum seal. These flanges typically come in CF and KF series, offering both male and female connectors, and can support single or multiple fiber feedthroughs. They are designed to achieve high vacuum degrees, typically better than 1x10⁻⁵ Pa and 1x10⁻⁷ Pa, ensuring the integrity of the vacuum environment. While primarily for ambient temperature use, custom high-temperature versions capable of withstanding up to 250℃ are also available.
Here are some standard images of the product:
You can find more detailed parameters on the product page: OFSCN® Fiber Optic Vacuum Sealed Flange